Gas Introduction

Characteristics of Hexafluorobutadiene: Flammable, toxic, colorless, odorless liquefied compressed gas in a rigid bottle, harmful to inhalation. When mixed with air at a concentration of 7%, there is an immediate risk of combustion and explosion
Storage of hexafluorobutadiene: Store in a cool and ventilated place, and keep the container tightly sealed. The temperature stored in the original container shall not exceed 50 ℃. Avoid direct sunlight. Be careful not to store it together with oxidants. Stay away from fireworks.
Hexafluorobutadiene is mainly used in advanced etching processes for large-scale integrated circuits. Compared with traditional etching gases, hexafluorobutadiene has a faster etching rate, higher selectivity and aspect ratio, and is more environmentally friendly

Product Parameters