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Ar
H2
CH4
CO2
100ppmH2/Ne
4.5%HCl/0.9%H2/Ne
0.95%F2/3.5%Ar/Ne
0.95%F2/1.25%Kr/Ne
1.25%Kr/Ne
SiH2Cl2
N2O
SiH4
No. 2 ,Total 4
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