CAS Number: 75-73-0
UN number: 1982
EINECS Number: 200-896-5
Molecular weight: 88
Appearance: colorless, odorless
Melting point: -184 ℃
Boiling point: -128.1 ℃
Density: 3.72 kg/m ³
DOT class: 2.2
Tag: Non flammable gas
Gas Introduction
Carbon tetrafluoride, also known as tetrafluoromethane, with the chemical formula CF4, can be considered as either a halogenated hydrocarbon (organic compound) or an inorganic compound. It is a colorless gas at room temperature and pressure, insoluble in water, and soluble in benzene and chloroform. It is mainly used in various ion etching processes of integrated circuits, as well as laser gas, low-temperature refrigerant, solvent, lubricant, insulation material, and coolant for infrared detection tubes.
Store in a cool and ventilated non combustible gas storage room. Stay away from sources of fire and heat. The storage temperature should not exceed 30 ℃. It should be stored separately from flammable materials and oxidants, and should not be stored together. The storage area should be equipped with emergency response equipment for leaks.
Product Parameters
Formula | CF4 |
Abundance of elements | 5N |
Package | 47L/470LL |
Valve | CGA580/ CGA320 |